Condensation coefficients in plasma sputtering deposition
نویسندگان
چکیده
Optical Emission Spectroscopy and Rutherford Backscattering Spectrometry are combined to determine condensation coefficients for plasma sputtering deposition. The method is applied for palladium deposition onto various substrates and condensation coefficients are found to lie between 0.4 and 0.9. PACS numbers: 81.15.Cd, 52.77.Dq Submitted to: J. Phys. D: Appl. Phys. § Corresponding author: Fax +33(0)2 38 41 71 54, e-mail: [email protected] ha l-0 01 80 17 8, v er si on 1 3 O ct 2 00 8 Author manuscript, published in "Journal of Physics D: Applied Physics 40 (2007) 2121-2123" DOI : 10.1088/0022-3727/40/7/039
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